Graduation date: 2006This thesis presents a Z-parameter based model to predict the substrate noise coupling between two contacts in a heavily doped substrate for frequencies less than 2 GHz. The empirical model is scalable with contact size and spacings between the contacts and model parameters can be readily extracted from simu- lated or measured data. The error is within acceptable limits and computational costs associated with extraction of substrate parasitics is significantly reduced by using this model compared to numerical techniques. An application of the model to analyze the substrate noise coupling between a digital and analog block is also demonstrated.