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Characterization of Diamond-Like Film after Focused Ion Beam Processing

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dc.creator Fu, Yongqi
dc.creator Ngoi, Kok Ann Bryan
dc.date 2003-11-29T20:01:36Z
dc.date 2003-11-29T20:01:36Z
dc.date 2003-01
dc.date.accessioned 2013-10-09T02:32:16Z
dc.date.available 2013-10-09T02:32:16Z
dc.date.issued 2013-10-09
dc.identifier http://hdl.handle.net/1721.1/3736
dc.identifier.uri http://koha.mediu.edu.my:8181/xmlui/handle/1721
dc.description Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.
dc.description Singapore-MIT Alliance (SMA)
dc.format 75758 bytes
dc.format application/pdf
dc.language en_US
dc.relation Innovation in Manufacturing Systems and Technology (IMST);
dc.subject DLC
dc.subject FIBM
dc.subject optical properties
dc.subject XPS
dc.title Characterization of Diamond-Like Film after Focused Ion Beam Processing
dc.type Article


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