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Environment of Er in a-Si:H: co-sputtering versus ion implantation

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dc.creator Piamonteze Cínthia
dc.creator Tessler Leandro R.
dc.creator Alves M. C. Martins
dc.creator Tolentino H.
dc.date 1999
dc.date.accessioned 2013-05-29T23:31:55Z
dc.date.available 2013-05-29T23:31:55Z
dc.date.issued 2013-05-30
dc.identifier http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97331999000400029
dc.identifier http://www.doaj.org/doaj?func=openurl&genre=article&issn=01039733&date=1999&volume=29&issue=4&spage=756
dc.identifier.uri http://koha.mediu.edu.my:8181/jspui/handle/123456789/2778
dc.description We report a comparative Extended X-Ray Fine Structure (EXAFS) study of Er in a-Si:H prepared by Er implantation in a-Si:H and by co-sputtering undergoing the same cumulative annealing processes. It was found that the Er environment in as-implanted samples is formed by Si atoms, which are replaced by oxygen under annealing. In the co-sputtered samples, the initial low coordination oxygen environment evolves under thermal treatment to an Er2O3 -like neighborhood.
dc.publisher Sociedade Brasileira de Física
dc.source Brazilian Journal of Physics
dc.title Environment of Er in a-Si:H: co-sputtering versus ion implantation


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