المستودع الأكاديمي جامعة المدينة

Influence of the substrate bias voltage on the crystallographic structure and surface composition of Ti6A14V thin films deposited by rf magnetron sputtering

أعرض تسجيلة المادة بشكل مبسط

dc.creator Alfonso, J.E.
dc.creator Torres, Trinidad José de
dc.creator Marco, J.F.
dc.date 2006-09
dc.date.accessioned 2017-01-31T00:58:41Z
dc.date.available 2017-01-31T00:58:41Z
dc.identifier Brazilian Journal of Physics 2006, vol. 36, no. 3b, pp. 994-996.
dc.identifier 0103-9733 (versión impresa)
dc.identifier 10261/2167
dc.identifier.uri http://dspace.mediu.edu.my:8181/xmlui/handle/123456789/121755
dc.description In this work, the influence of the substrate bias on the crystalline structure and surface composition of Ti6Al4V thin films prepared by rf magnetron sputtering were studied. Samples were grown onto two different types of substrates: AISI 420 steel and common glass using a Ti6Al4V (99.9 %) target. Substrate bias was varied from -100V to -200 V. Samples were characterized by X-ray diffraction (XRD), Energy Dispersive X-ray Analysis (EDX), Scanning Electron Microscopy (SEM), and X-Ray Photoelectron Spectroscopy (XPS). It was observed that the increase of the substrate voltage improved the crystallinity of the deposited films. The stoichiometry of the deposited thin films was studied by EDX and found to be slightly different from that of the target material. Finally, the passive film spontaneously formed on the deposited films upon exposure to the laboratory atmosphere was studied by XPS. The composition of the passive film is rather complex since it contains several forms of oxidized titanium and vanadium as well as Al2O3.
dc.description Peer reviewed
dc.language eng
dc.publisher Sociedade Brasileira de Física
dc.rights openAccess
dc.subject Sputtering
dc.subject Bias
dc.subject Steel
dc.title Influence of the substrate bias voltage on the crystallographic structure and surface composition of Ti6A14V thin films deposited by rf magnetron sputtering
dc.type Artículo


الملفات في هذه المادة

الملفات الحجم الصيغة عرض

لا توجد أي ملفات مرتبطة بهذه المادة.

هذه المادة تبدو في المجموعات التالية:

أعرض تسجيلة المادة بشكل مبسط