| dc.creator |
Tello Ruiz, Marta |
|
| dc.creator |
García García, Ricardo |
|
| dc.date |
2008-01-31T18:10:52Z |
|
| dc.date |
2008-01-31T18:10:52Z |
|
| dc.date |
2003-09-22 |
|
| dc.date.accessioned |
2017-01-31T00:59:54Z |
|
| dc.date.available |
2017-01-31T00:59:54Z |
|
| dc.identifier |
Applied Physics Letters 83, 12: 2339-2341 (2003) |
|
| dc.identifier |
0003-6951 |
|
| dc.identifier |
http://hdl.handle.net/10261/2815 |
|
| dc.identifier |
10.1063/1.1613799 |
|
| dc.identifier.uri |
http://dspace.mediu.edu.my:8181/xmlui/handle/10261/2815 |
|
| dc.description |
We demonstrate that local oxidation nanolithography can be performed in liquid environments different from aqueous solutions with a significant improvement in the aspect ratio of the fabricated motives. Here, we perform a comparative study of noncontact atomic force microscopy oxidation
experiments in water and ethyl alcohol. The growth rate of local oxides can be increased by almost an order of magnitude by using oxyanions from ethyl alcohol molecules. We propose that the enhanced growth rate is a consequence of the reduction of the trapped charges within the growing oxide. The present results open the possibility of using local oxidation nanolithography to directly fabricate vertical oxide structures while keeping lateral sizes in the nanometer range. |
|
| dc.description |
This work was supported by the European Commission (MONA-LISA, G5RD-2000-00349). |
|
| dc.description |
Peer reviewed |
|
| dc.format |
146546 bytes |
|
| dc.format |
application/pdf |
|
| dc.language |
eng |
|
| dc.publisher |
American Institute of Physics |
|
| dc.rights |
openAccess |
|
| dc.subject |
Oxidation |
|
| dc.subject |
Organic Compounds |
|
| dc.subject |
Nanolithography |
|
| dc.subject |
Atomic Force Microscopy |
|
| dc.subject |
Water |
|
| dc.subject |
Silicon |
|
| dc.subject |
Elemental Semiconductors |
|
| dc.title |
Giant growth rate in nano-oxidation of p-silicon surfaces by using ethyl alcohol liquid bridges |
|
| dc.type |
Artículo |
|