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From carbon nanostructures to new photoluminescence sources: an overview of new perspectives and emerging applications of low pressure PECVD

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dc.creator Gordillo Vázquez, Francisco J.
dc.creator Herrero, Víctor J.
dc.creator Tanarro, Isabel
dc.date 2008-01-09T15:49:42Z
dc.date 2008-01-09T15:49:42Z
dc.date 2007
dc.date.accessioned 2017-01-31T00:59:39Z
dc.date.available 2017-01-31T00:59:39Z
dc.identifier Chemical Vapor Deposition 13(6-7): 267-279 (2007)
dc.identifier 0948-1907
dc.identifier http://hdl.handle.net/10261/2661
dc.identifier 10.1002/cvde.200604034
dc.identifier.uri http://dspace.mediu.edu.my:8181/xmlui/handle/10261/2661
dc.description 13 pages, 9 figures.
dc.description Low-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.
dc.description FJGV acknowledges partial financial support from CSIC-CAM (Project No. 200550M016 and 200650M016) and MEC (Projects No. MAT2006-13006-C02-01 and ENE2006-14577-C04-03), VJH and IT acknowledge funding from MEC (Projects No. FTN-2003-08228-C03-03, FIS2004-00456 and ENE2006-14577-C04-03).
dc.description Peer reviewed
dc.format 22195 bytes
dc.format application/pdf
dc.language eng
dc.publisher John Wiley & Sons
dc.relation http://dx.doi.org/10.1002/cvde.200604034
dc.rights openAccess
dc.subject Biomedical applications
dc.subject Nanoparticles, inorganic
dc.subject Novel diagnostics
dc.subject Plasma-enhanced CVD (PECVD), low pressure
dc.subject Plasma
dc.subject Silica
dc.title From carbon nanostructures to new photoluminescence sources: an overview of new perspectives and emerging applications of low pressure PECVD
dc.type Artículo


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