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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/5989| Title: | Piezoelectric Micromotors for Microrobots |
| Keywords: | micromotors microrobots piezoelectric traveling wavesmotors ultrasonic motors gnat robots |
| Issue Date: | 9-Oct-2013 |
| Description: | By combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated. |
| URI: | http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
| Other Identifiers: | AIM-1269 http://hdl.handle.net/1721.1/5989 |
| Appears in Collections: | MIT Items |
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