Please use this identifier to cite or link to this item: http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/5989
Title: Piezoelectric Micromotors for Microrobots
Keywords: micromotors
microrobots
piezoelectric
traveling wavesmotors
ultrasonic motors
gnat robots
Issue Date: 9-Oct-2013
Description: By combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated.
URI: http://koha.mediu.edu.my:8181/xmlui/handle/1721
Other Identifiers: AIM-1269
http://hdl.handle.net/1721.1/5989
Appears in Collections:MIT Items

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