Characterization of mechanical and optical properties of x-ray mask membranes

Please use this identifier to cite or link to this item: http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/4188

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DC Field	Value	Language
dc.contributor	Tsai, Flora S.	-
dc.date	2004-03-02T18:29:34Z	-
dc.date	2004-03-02T18:29:34Z	-
dc.date	1991	-
dc.date.accessioned	2013-10-09T02:34:24Z	-
dc.date.available	2013-10-09T02:34:24Z	-
dc.date.issued	2013-10-09	-
dc.identifier	no.564	-
dc.identifier	http://hdl.handle.net/1721.1/4188	-
dc.identifier.uri	http://koha.mediu.edu.my:8181/xmlui/handle/1721	-
dc.description	Flora S. Tsai.	-
dc.description	Includes bibliographical references (leaves 48-49).	-
dc.description	Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018	-
dc.format	49 leaves	-
dc.format	2055944 bytes	-
dc.format	application/pdf	-
dc.language	eng	-
dc.publisher	Research Laboratory of Electronics, Massachusetts Institute of Technology	-
dc.relation	Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.	-
dc.subject	TK7855.M41 R43 no.564	-
dc.title	Characterization of mechanical and optical properties of x-ray mask membranes	-
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