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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/4188| Title: | Characterization of mechanical and optical properties of x-ray mask membranes |
| Authors: | Tsai, Flora S. |
| Keywords: | TK7855.M41 R43 no.564 |
| Issue Date: | 9-Oct-2013 |
| Publisher: | Research Laboratory of Electronics, Massachusetts Institute of Technology |
| Description: | Flora S. Tsai. Includes bibliographical references (leaves 48-49). Research supported by the National Science Foundation. ECS 90-16437 Research supported by the Naval Research Laboratory. N00014-90-K-2018 |
| URI: | http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
| Other Identifiers: | no.564 http://hdl.handle.net/1721.1/4188 |
| Appears in Collections: | MIT Items |
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