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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/4187| Title: | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| Authors: | Early, Kathleen. |
| Keywords: | TK7855.M41 R43 no.565 |
| Issue Date: | 9-Oct-2013 |
| Publisher: | Research Laboratory of Electronics, Massachusetts Institute of Technology |
| Description: | Kathleen R. Early. Includes bibliographical references (p. 155-163). Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806 |
| URI: | http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
| Other Identifiers: | no. 565 http://hdl.handle.net/1721.1/4187 |
| Appears in Collections: | MIT Items |
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