Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Please use this identifier to cite or link to this item: http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/4187

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DC Field	Value	Language
dc.contributor	Early, Kathleen.	-
dc.date	2004-03-02T18:29:32Z	-
dc.date	2004-03-02T18:29:32Z	-
dc.date	1991	-
dc.date.accessioned	2013-10-09T02:34:24Z	-
dc.date.available	2013-10-09T02:34:24Z	-
dc.date.issued	2013-10-09	-
dc.identifier	no. 565	-
dc.identifier	http://hdl.handle.net/1721.1/4187	-
dc.identifier.uri	http://koha.mediu.edu.my:8181/xmlui/handle/1721	-
dc.description	Kathleen R. Early.	-
dc.description	Includes bibliographical references (p. 155-163).	-
dc.description	Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806	-
dc.format	163 p.	-
dc.format	12011723 bytes	-
dc.format	application/pdf	-
dc.language	eng	-
dc.publisher	Research Laboratory of Electronics, Massachusetts Institute of Technology	-
dc.relation	Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565.	-
dc.subject	TK7855.M41 R43 no.565	-
dc.title	Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography	-
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