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Please use this identifier to cite or link to this item: http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3836
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dc.creatorZhang, Sam-
dc.creatorFu, Yongqing-
dc.creatorDu, Hejun-
dc.creatorLiu, Yang-
dc.creatorChen, Tupei-
dc.date2003-12-13T17:28:56Z-
dc.date2003-12-13T17:28:56Z-
dc.date2004-01-
dc.date.accessioned2013-10-09T02:32:44Z-
dc.date.available2013-10-09T02:32:44Z-
dc.date.issued2013-10-09-
dc.identifierhttp://hdl.handle.net/1721.1/3836-
dc.identifier.urihttp://koha.mediu.edu.my:8181/xmlui/handle/1721-
dc.descriptionThe design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity.-
dc.descriptionSingapore-MIT Alliance (SMA)-
dc.format379704 bytes-
dc.formatapplication/pdf-
dc.languageen_US-
dc.relationAdvanced Materials for Micro- and Nano-Systems (AMMNS);-
dc.subjectnanocomposite-
dc.subjectfilms-
dc.subjectsuperhardness-
dc.subjecttoughness-
dc.subjectphotoluminescence-
dc.subjectoptical-
dc.titleNanocomposite Thin Films for both Mechanical and Functional Applications-
dc.typeArticle-
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