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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3836| Title: | Nanocomposite Thin Films for both Mechanical and Functional Applications |
| Keywords: | nanocomposite films superhardness toughness photoluminescence optical |
| Issue Date: | 9-Oct-2013 |
| Description: | The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity. Singapore-MIT Alliance (SMA) |
| URI: | http://koha.mediu.edu.my:8181/xmlui/handle/1721 |
| Other Identifiers: | http://hdl.handle.net/1721.1/3836 |
| Appears in Collections: | MIT Items |
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