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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3825Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.creator | Jin, Lijuan | - |
| dc.creator | Pey, Kin Leong | - |
| dc.creator | Choi, Wee Kiong | - |
| dc.creator | Fitzgerald, Eugene A. | - |
| dc.creator | Antoniadis, Dimitri A. | - |
| dc.creator | Chi, D.Z. | - |
| dc.date | 2003-12-13T16:23:54Z | - |
| dc.date | 2003-12-13T16:23:54Z | - |
| dc.date | 2004-01 | - |
| dc.date.accessioned | 2013-10-09T02:32:39Z | - |
| dc.date.available | 2013-10-09T02:32:39Z | - |
| dc.date.issued | 2013-10-09 | - |
| dc.identifier | http://hdl.handle.net/1721.1/3825 | - |
| dc.identifier.uri | http://koha.mediu.edu.my:8181/xmlui/handle/1721 | - |
| dc.description | The effect of Ni and Ni(Pt) alloy with ~5 and 10 at. % Pt on the agglomeration and Ge out-diffusion in Nickel germanosilicide formed on Si₀.₇₅Ge₀.₂₅(100) has been studied. A remarkable improvement in the agglomeration behavior with increasing Pt atomic percentage is observed by sheet resistance measurements and scanning electron microscopy (SEM). In addition, x-ray diffraction (XRD) shows that only NiSiGe or Ni(Pt)SiGe phase exists from 400 to 800°C. However, Ge out-diffusion from the monogermanosilicide grains is obvious at 600°C and 700°C for Ni/SiGe and Ni(Pt)(Pt at.%~10%)/SiGe, respectively, evident by XRD and micro-Raman spectroscopy. The improved melting temperature of Ni(Pt)SiGe solution compared to that of NiSiGe is the likely reason of seeing better surface morphology and suppressing Ge out-diffusion of the germanosilicide grains observed. | - |
| dc.description | Singapore-MIT Alliance (SMA) | - |
| dc.format | 1019837 bytes | - |
| dc.format | application/pdf | - |
| dc.language | en_US | - |
| dc.relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); | - |
| dc.subject | agglomeration | - |
| dc.subject | Ge out-diffusion | - |
| dc.title | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide | - |
| dc.type | Article | - |
| Appears in Collections: | MIT Items | |
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