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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3671Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.creator | Cheng, Zhiyuan | - |
| dc.creator | Jung, Jongwan | - |
| dc.creator | Lee, Minjoo L. | - |
| dc.creator | Nayfeh, Hasan | - |
| dc.creator | Pitera, Arthur J. | - |
| dc.creator | Hoyt, Judy L. | - |
| dc.creator | Fitzgerald, Eugene A. | - |
| dc.creator | Antoniadis, Dimitri A. | - |
| dc.date | 2003-11-16T17:51:20Z | - |
| dc.date | 2003-11-16T17:51:20Z | - |
| dc.date | 2003-01 | - |
| dc.date.accessioned | 2013-10-09T02:31:53Z | - |
| dc.date.available | 2013-10-09T02:31:53Z | - |
| dc.date.issued | 2013-10-09 | - |
| dc.identifier | http://hdl.handle.net/1721.1/3671 | - |
| dc.identifier.uri | http://koha.mediu.edu.my:8181/xmlui/handle/1721 | - |
| dc.description | Two SiGe-on-insulator (SGOI) structures for CMOS application are presented: surface-channel strained-Si on SGOI (SSOI) and dual-channel SGOI structures. Comparisons between two structures are made from both device performance and CMOS process point of view. We have demonstrated both structures on SGOI, and have fabricated n-MOSFET’s and p-MOSFET’s on those two structures respectively. Device characteristics are presented. The devices show enhancement on both electron and hole mobilities. | - |
| dc.description | Singapore-MIT Alliance (SMA) | - |
| dc.format | 432824 bytes | - |
| dc.format | application/pdf | - |
| dc.language | en_US | - |
| dc.relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); | - |
| dc.subject | strained-Si | - |
| dc.subject | SiGe | - |
| dc.subject | SiGe-on-Insulator | - |
| dc.subject | SGOI | - |
| dc.subject | strained-Si on SGOI | - |
| dc.subject | SSOI | - |
| dc.subject | SOI | - |
| dc.subject | dual-channel | - |
| dc.subject | surface channel | - |
| dc.subject | MOSFET | - |
| dc.subject | mobility | - |
| dc.subject | bonding | - |
| dc.subject | etch-back | - |
| dc.title | SiGe-On-Insulator (SGOI): Two Structures for CMOS Application | - |
| dc.type | Article | - |
| Appears in Collections: | MIT Items | |
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