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http://dspace.mediu.edu.my:8181/xmlui/handle/1721.1/3670Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.creator | Thompson, Carl V. | - |
| dc.date | 2003-11-10T20:18:14Z | - |
| dc.date | 2003-11-10T20:18:14Z | - |
| dc.date | 2003-01 | - |
| dc.date.accessioned | 2013-10-09T02:31:53Z | - |
| dc.date.available | 2013-10-09T02:31:53Z | - |
| dc.date.issued | 2013-10-09 | - |
| dc.identifier | http://hdl.handle.net/1721.1/3670 | - |
| dc.identifier.uri | http://koha.mediu.edu.my:8181/xmlui/handle/1721 | - |
| dc.description | Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with a number of SMA Fellows, Associates, and students, our group is carrying out research focused on probing, modeling and controlling nano-scale structural evolution during both vapor-phase and solid-phase polycrystalline film formation. In particular, high-sensitivity in-situ and real-time stress measurements are being used to study atomic scale forces and to characterize structure formation and evolution at the nano-scale. In other collaborative research, the affects of controlled structure and multi-film architectures on properties, such as piezoelectric characteristics and electromigration-limited reliability, are being explored. Through these interrelated activities, basic principles of the science and engineering of nano-scale materials are emerging. | - |
| dc.description | Singapore-MIT Alliance (SMA) | - |
| dc.format | 315579 bytes | - |
| dc.format | application/pdf | - |
| dc.language | en_US | - |
| dc.relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); | - |
| dc.subject | interconnects | - |
| dc.subject | MEMS | - |
| dc.subject | stress | - |
| dc.subject | thin films | - |
| dc.title | Research on Polycrystalline Films for Micro- and Nano-Systems | - |
| dc.type | Article | - |
| Appears in Collections: | MIT Items | |
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