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Low Pressure PECVD of Nanoparticles in carbon thin films from low pressure radiofrequency Ar/H2/C2H2 plasmas. Synthesis of films and analysis of the electron energy distribution function 50

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Low Pressure PECVD of Nanoparticles in carbon thin films from low pressure radiofrequency Ar/H2/C2H2 plasmas. Synthesis of films and analysis of the electron energy distribution function 0 0 2 3 0 0 0

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