Browsing by Subject CVD silicon carbide
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 9-Oct-2013 | Process development of silicon-silicon carbide hybrid structures for micro-engines (January 2002) | - |
| Issue Date | Title | Author(s) |
|---|---|---|
| 9-Oct-2013 | Process development of silicon-silicon carbide hybrid structures for micro-engines (January 2002) | - |